국내 최대 기계 및 로봇 연구정보

기술보고서

기술보고서 게시판 내용
타이틀	Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy
저자	Merrell, Willie C., II;; Aslam, Shahid;; Brown, Ari D.;; Chervenak, James A.;; Huang, Wei-Chung;; Quijada, Manuel;; Wollack, Edward
Keyword	BANDPASS FILTERS;; FABRICATION;; INFRARED SPECTROSCOPY;; LOW TEMPERATURE ENVIRONMENTS;; MESH;; MICROMACHINING;; PLANETARY ENVIRONMENTS;; RADIOMETERS;; SEMICONDUCTORS (MATERIALS); SPACE MISSIONS;; SPECTROSCOPY
URL	http://hdl.handle.net/2060/20110022651
보고서번호	GSFC.JA.5300.2011
발행년도	2011
출처	NTRS (NASA Technical Report Server)
ABSTRACT	The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.