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국내 최대 기계·건설 공학연구정보
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  • Virtuous6D
  • 국내학술대회

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    국내학술대회 제목 게시판 내용
    제목(국문) AFM을 위한 VCM 구동 flexure hinge 스테이지의 최적 설계 및 제어
    제목(영문) Optimal Design and Control of a Voice Coil Motor Driven Flexure Hinge for Afm Actuator
    저자 염우섭 (WooSub Youm ,GIST ) ▷공저자네트워크등록하기
    이성규 (Sung-Q Lee ,ETRI ) ▷공저자네트워크등록하기
    박기환 (KyiHwan Park ,GIST ) ▷공저자네트워크등록하기
    초록 A systemic design procedure of general VCM(Voice Coil Motor) to fine z-axis AFM(Atomic Force Microscopy) actuator is introduced for fast and precision actuation. As a fine z-axis actuator, PZT and flexure hinge mechanism has been widely used for A17Ms. However, PZT actuator has disadvantages of hysteresis, creep, and short working distance. Therefore, in this research, the VCM and flexure hinge mechanism is selected to be free from the weakness of the PZT actuator. In design procedure, design parameters are selected based on the dynamic model of VCM and flexure hinge, and design process is proceeded in point of fast and precision actuation. To verify the performance of the designed actuator, frequency response of the actuator and contact type AFM image of standard grid sample are performed.
    keyword AFM, VCM(보이스 코일 모터), Flexure Hinge(유연힌지)
    저널명 대한기계학회 춘계학술대회 ▷관련저널보기
    VOL 5
    PAGE 1150-1154
    발표년도 2005
    국문File 국문다운로드
    영문File
    • 페이스북아이콘
    • 트위터 아이콘

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