|제목(국문)||정밀 제조장비의 진동제어를 위한 세 개의 새로운 작동기 실험|
|제목(영문)||A novel triple-actuating mechanism of an active air mount for vibration control of precision manufacturing machines: experimental work|
|저자||Hyung-Tae Kim, Cheol-Ho Kim, Seung-Bok Choi, Seok-Jun Moon and Won-Gil Song|
* 해당자료는 교신저자이신 인하대학교 최승복 교수님이 제공해주신 자료이며, 인터뷰 자료에 넣기 위해 첨부하였습니다. 따라서 번역자료가 아닌 원문이 제공됩니다.
With the goal of vibration control and isolation in a clean room, we propose a new type of air mount which consists of pneumatic, electromagnetic (EM), and magnetorheological (MR) actuators. The air mount is installed below a semiconductor manufacturing machine to reduce the adverse effects caused by unwanted vibration. The proposed mechanism integrates the forces in a parallel connection of the three actuators. The MR part is designed to operate in an air spring in which the EM part is installed. The control logic is developed with a classical method and a switching mode to avoid operational mismatch among the forces developed. Based on extended microprocessors, a portable, embedded controller is installed to execute both nonlinear logic and digital communication with the peripherals. The pneumatic forces constantly support the heavy weight of an upper structure and maintain the level of the air mount. The MR damper handles the transient response, while the EM controller reduces the resonance response, which is switched mutually with a threshold. Vibration is detected by laser displacement sensors which have submicron resolution. The impact test results of three tons load weight demonstrate practical feasibility by showing that the proposed triple-actuating mechanism can reduce the transient response as well as the resonance in the air mount, resulting in accurate motion of the semiconductor manufacturing machine.
|저널명||Smart Materials and Structures, Volume 23, Number 7|