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  • Objet30 Prime (3D프린터)
  • 국내학술지

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    국내학술지 제목 게시판 내용
    제목(국문) 입자연마가공에서의 입자 형상의 영향에 대한 고찰
    제목(영문) A Closer Look at the Effect of Particle Shape on Machined Surface Abrasive Machining
    저자 김동균 (Dong Geun Kim ,한남대학교 대학원 기계공학과 ) ▷공저자네트워크등록하기
    성인하 (In-Ha Sung ,한남대학교 기계공학과 ) ▷공저자네트워크등록하기
    초록 Despite the increasing need of nanometer-scale accuracy in abrasive machining using ultrasmall particles such as abrasive jet and chemical polishing(CMP), the process mechanism is still unknown. Based on the background, research on the effects of various process parameters on the machined surface at abrasive machining was motivated and performed by using finite element analysis where the effect of slurry fluid flow involved. The effect of particle shape on the machined surface during particle-surface collision was discussed in this paper. The results from FEA simulation revealed that any damamge or defect generation on machined surface by the impact may occur only if the particle has enough impact energy. Therefore, it could be concluded that generation of the defects and damage on the wafer surface after CMP process was mainly due to direct contact of the 3 bodies, i.e., pad-particle-wafer.
    keyword abrasive particle(연마입자), chemical-mechanical polishing(CMP, 기계-화학적 연마가공), finite element analysis(FEA, 유한요소해석)
    저널명 윤활학회지 ▷관련저널보기
    VOL 26
    PAGE 219-223
    발표년도 2010
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